Low-Cost Fabrication Techniques for RF Microelectromechanical systems (MEMS) Switches and Varactors

Obuh, Isibor Ehi (2018) Low-Cost Fabrication Techniques for RF Microelectromechanical systems (MEMS) Switches and Varactors. PhD thesis, University of Leeds.

Abstract

Metadata

Keywords: Micro electromechanical systems (MEMS), rapid prototyping, laser microstructuring, non-clean room micro-lithography standard wet bench techniques
Awarding institution: University of Leeds
Academic Units: The University of Leeds > Faculty of Engineering (Leeds) > School of Electronic & Electrical Engineering (Leeds) > Institute of Microwaves and Photonics (Leeds)
Identification Number/EthosID (e.g. uk.bl.ethos.123456): uk.bl.ethos.755121
Depositing User: Isibor Obuh
Date Deposited: 05 Oct 2018 10:49
Last Modified: 18 Feb 2020 12:32

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