Computational and instrumental developments in quantitative Auger electron analysis.

The technique of quantitative Auger electron spectroscopy (AES) is central to modem
surface analysis. Development, both in terms of new instrumental apparatus and the
theoretical basis of Auger analysis, has been the subject of intense research. The work
presented here investigates two of the current issues surrounding Auger electron
spectroscopy and microscopy.
The modelling of electron-solid interaction is reviewed, and investigations are carried out
into the two well established computational techniques, transport theory and Monte Carlo
simulation. The transport mean free path, V and the inelastic mean free path, A* describe
electron transport in solids to the first order. Variations in these parameters with energy
and atomic number are explored with a view to identifying trends and establishing the
extent to which generalisations are valid.
Although transport theory calculations have been shown to give an accurate
representation of true electron behaviour, their application is largely limited to
homogeneous materials. Monte Carlo modeling provides us with a more rigorous
treatment of complex experimental conditions. A new Monte Carlo model is presented
which allows extension of existing simulations to incorporate heterogeneous multilayered samples.
The design of integrated circuits is an extremely fast moving technology, with routine
manufacture of nanometric feature sizes now becoming a reality. The second part of this
work is devoted to the design of an angle resolved electron spectrometer with a very high
resolution field emission electron probe. It is intended that high resolution analysis,
coupled with the ability to resolve the azimuthal component of electron trajectories, will
offer new insight into the surface features of ultra large scale integrated circuits.