Investigation of doping contrast in gallium arsenide by scanning electron microscopy and atomic force microscopy

Guo, Ran (2023) Investigation of doping contrast in gallium arsenide by scanning electron microscopy and atomic force microscopy. PhD thesis, University of Sheffield.

Metadata

Supervisors: Walther, Thomas
Keywords: SEM, SE imaging, doping contrast, AFM, semiconductor, AFM, KPFM
Awarding institution: University of Sheffield
Academic Units: The University of Sheffield > Faculty of Engineering (Sheffield) > Electronic and Electrical Engineering (Sheffield)
Depositing User: Dr Ran Guo
Date Deposited: 23 Aug 2023 08:34
Last Modified: 23 Aug 2023 08:34

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