Structure, Mechanical and Tribological Properties of Hydrogen-free Amorphous Carbon Films Deposited by Dual-Frequency Mode Pulsed-DC Magnetron Sputtering

Liu, Chang (2017) Structure, Mechanical and Tribological Properties of Hydrogen-free Amorphous Carbon Films Deposited by Dual-Frequency Mode Pulsed-DC Magnetron Sputtering. PhD thesis, University of Sheffield.

Abstract

Metadata

Keywords: a-C films, tribology, PVD
Awarding institution: University of Sheffield
Academic Units: The University of Sheffield > Faculty of Engineering (Sheffield)
The University of Sheffield > Faculty of Engineering (Sheffield) > Materials Science and Engineering (Sheffield)
Identification Number/EthosID (e.g. uk.bl.ethos.123456): uk.bl.ethos.722765
Depositing User: Mr Chang Liu
Date Deposited: 08 Sep 2017 14:01
Last Modified: 12 Oct 2018 09:44

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Structure, Mechanical and Tribological Properties of Hydrogen-free Amorphous Carbon Films Deposited by Dual-Frequency Mode Pulsed-DC Magnetron Sputtering.

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