Dynamics of the Plasma-Surface Interface in Capacitively Coupled Radio-Frequency Oxygen Plasmas: Coupling Numerical Simulations with Optical Diagnostics

Greb, Arthur (2013) Dynamics of the Plasma-Surface Interface in Capacitively Coupled Radio-Frequency Oxygen Plasmas: Coupling Numerical Simulations with Optical Diagnostics. PhD thesis, University of York.

Abstract

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Supervisors: Gans, Timo and O'Connell, Deborah
Awarding institution: University of York
Academic Units: The University of York > Physics (York)
Identification Number/EthosID: uk.bl.ethos.589310
Depositing User: Mr Arthur Greb
Date Deposited: 10 Feb 2014 10:59
Last Modified: 08 Sep 2016 13:30

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